Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Main Authors: | , , , , , , , , , , , |
---|---|
格式: | 文件 |
语言: | English |
出版: |
American Chemical Society
2020-10-01
|
丛编: | ACS Omega |
在线阅读: | https://doi.org/10.1021/acsomega.0c03865 |