Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Main Authors: | , , , , , , , , , , , |
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格式: | Article |
語言: | English |
出版: |
American Chemical Society
2020-10-01
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叢編: | ACS Omega |
在線閱讀: | https://doi.org/10.1021/acsomega.0c03865 |