Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources

Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources

Bibliographische Detailangaben
Hauptverfasser:	Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, Masaru Hori
Format:	Artikel
Sprache:	English
Veröffentlicht:	American Chemical Society 2020-10-01
Schriftenreihe:	ACS Omega
Online Zugang:	https://doi.org/10.1021/acsomega.0c03865

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