Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Hauptverfasser: | , , , , , , , , , , , |
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Format: | Artikel |
Sprache: | English |
Veröffentlicht: |
American Chemical Society
2020-10-01
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Schriftenreihe: | ACS Omega |
Online Zugang: | https://doi.org/10.1021/acsomega.0c03865 |