Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources

Номзүйн дэлгэрэнгүй
Үндсэн зохиолчид: Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, Masaru Hori
Формат: Өгүүллэг
Хэл сонгох:English
Хэвлэсэн: American Chemical Society 2020-10-01
Цуврал:ACS Omega
Онлайн хандалт:https://doi.org/10.1021/acsomega.0c03865