Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Hoofdauteurs: | , , , , , , , , , , , |
---|---|
Formaat: | Artikel |
Taal: | English |
Gepubliceerd in: |
American Chemical Society
2020-10-01
|
Reeks: | ACS Omega |
Online toegang: | https://doi.org/10.1021/acsomega.0c03865 |