Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources

Bibliográfalaš dieđut
Váldodahkkit: Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, Masaru Hori
Materiálatiipa: Artihkal
Giella:English
Almmustuhtton: American Chemical Society 2020-10-01
Ráidu:ACS Omega
Liŋkkat:https://doi.org/10.1021/acsomega.0c03865