A Miniaturized and Fast System for Thin Film Thickness Measurement
Transparent films are significant industrial components that are widely used in modern optics, microelectronics, optical engineering, and other related fields. There is an urgent need for the fast and stable thickness measurement of industrial films at the micron-grade. This paper built a miniaturiz...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/20/7284 |