Synthesis and Properties of Electrically Conductive/Nitrogen Grain Boundaries Incorporated Ultrananocrystalline Diamond (N-UNCD) Thin Films Grown by Microwave Plasma Chemical Vapor Deposition (MPCVD)
Research and development have been performed to investigate the effect of total pressure and microwave power on the electrical conductivity of nitrogen (N) atoms’ grain boundaries incorporated ultrananocrystalline diamond (N-UNCD) films grown by microwave plasma chemical vapor deposition (MPCVD). In...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-09-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/11/18/8443 |