Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption

Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption

Creation of arbitrary features with high resolution is critically important in the fabrication of nano-optoelectronic devices. Here, sub-50 nm surface structuring is achieved directly on Sb2S3 thin films via microsphere femtosecond laser irradiation in far field. By varying laser fluence and scannin...

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Bibliographic Details
Main Authors: Zhenyuan Lin, Kuan Liu, Tun Cao, Minghui Hong
Format: Article
Language:English
Published: Institue of Optics and Electronics, Chinese Academy of Sciences 2023-06-01
Series:Opto-Electronic Advances
Subjects:
non-linear effect
microsphere
femtosecond laser
far field
Online Access:https://www.oejournal.org/article/doi/10.29026/oea.2023.230029

Internet

https://www.oejournal.org/article/doi/10.29026/oea.2023.230029

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