Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption
Creation of arbitrary features with high resolution is critically important in the fabrication of nano-optoelectronic devices. Here, sub-50 nm surface structuring is achieved directly on Sb2S3 thin films via microsphere femtosecond laser irradiation in far field. By varying laser fluence and scannin...
| Автори: | , , , |
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| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2023-06-01
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| Серія: | Opto-Electronic Advances |
| Предмети: | |
| Онлайн доступ: | https://www.oejournal.org/article/doi/10.29026/oea.2023.230029 |