Fabrication of Microbolometer Arrays Based on Polymorphous Silicon–Germanium

Fabrication of Microbolometer Arrays Based on Polymorphous Silicon–Germanium

This work reports the development of arrays of infrared sensors (microbolometers) using a hydrogenated polymorphous silicon–germanium alloy (pm-Si<sub>x</sub>Ge<sub>1-x</sub>:H). Basically, polymorphous semiconductors consist of an amorphous semiconductor matrix with embedded...

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Bibliographic Details
Main Authors: Ricardo Jimenez, Mario Moreno, Alfonso Torres, Alfredo Morales, Arturo Ponce, Daniel Ferrusca, Jose Rangel-Magdaleno, Jorge Castro-Ramos, Julio Hernandez-Perez, Eduardo Cano
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
infrared
sensor
microbolometer
array
polymorphous
silicon
Online Access:https://www.mdpi.com/1424-8220/20/9/2716

Internet

https://www.mdpi.com/1424-8220/20/9/2716

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