Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations
To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber cleaning operations on cluster tools; this has been widely used in semiconductor manufacturing. Wafer residency time constraints and chamber cleaning operations make the scheduling problem of cluster tools...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/19/9193 |