Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

Among all the allotropic forms of carbon, diamond has attracted a broad scientific and technological interest for its extreme and unique properties rarely matched by other materials in nature. In a rapid rise from a technological point of view, much has been achieved in the study of obtaining this m...

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Bibliographic Details
Main Authors: J. V. Silva Neto, J. S. Gómez, E. J. Corat, V. J. Trava-Airoldi
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2022-09-01
Series:Materials Research
Subjects:
Polycrystalline
CVD diamond
Raman spectroscopy
MWPACVD
Plasma
Characterization
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000300206&lng=en&tlng=en

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000300206&lng=en&tlng=en

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