Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition
In this study, we designed two types of gas-sensor chips with silicon−carbon film, doped with CuO, as the sensitive layer. The first type of gas-sensor chip consists of an Al<sub>2</sub>O<sub>3</sub> substrate with a conductive chromium sublayer of ~10 nm thickness...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/7/4/52 |