Architecture of composite multilayer semiconductor nanostructures
The problem of ensuring the operational parameters of composite multilayer semiconductor nanoscale structures at the design technology stages is solved. A mathematical model based on the physics of processes occurring in the structure during operation is developed. The problem is solved for the reso...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/50/e3sconf_interagromash2023_02026.pdf |