Single-Ion Counting with an Ultra-Thin-Membrane Silicon Carbide Sensor

Single-Ion Counting with an Ultra-Thin-Membrane Silicon Carbide Sensor

In recent times, ion implantation has received increasing interest for novel applications related to deterministic material doping on the nanoscale, primarily for the fabrication of solid-state quantum devices. For such applications, precise information concerning the number of implanted ions and th...

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Bibliographic Details
Main Authors: Enrico Sangregorio, Lucia Calcagno, Elisabetta Medina, Andreo Crnjac, Milko Jakšic, Anna Vignati, Francesco Romano, Giuliana Milluzzo, Marzio De Napoli, Massimo Camarda
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Materials
Subjects:
silicon carbide
membrane sensor
deterministic ion implantation
counting efficiency
spatial resolution
Online Access:https://www.mdpi.com/1996-1944/16/24/7692

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https://www.mdpi.com/1996-1944/16/24/7692

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