Enhanced mechanical property through high-yield fabrication process with double laser scanning method in two-photon lithography
Two-photon lithography (TPL) is a representative fabrication process for micro 3D structures with a sub-micron fabrication resolution. As the TPL process is developed and commercialized, the TPL process requires higher process yield to be a considered reliable manufacturing technique for mass produc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-11-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127523008043 |