Four-Level Micro-Via Technology (4LµV) for ASIC Integration in Active Flexible Sensor Arrays

Systems-in-foil with multi-sensor arrays require extensive wiring with large numbers of data lines. This prevents scalability of the arrays and thus limits the applications. To enable multiplexing and thus reducing the external connections down to few digital data links and a power supply, active ci...

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Bibliographic Details
Main Authors: Maolei Zhou, Chresten von der Heide, Andreas Dietzel
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/13/4723