MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range
Micro-electromechanical system (MEMS) skin friction sensors are considered to be promising sensors in hypersonic wind tunnel experiments owing to their miniature size, high sensitivity, and stability. Aiming at the problem of short test duration (a few milliseconds) and heavy load in a shock wind tu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/2/234 |