MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range
Micro-electromechanical system (MEMS) skin friction sensors are considered to be promising sensors in hypersonic wind tunnel experiments owing to their miniature size, high sensitivity, and stability. Aiming at the problem of short test duration (a few milliseconds) and heavy load in a shock wind tu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/2/234 |
| _version_ | 1797477906210881536 |
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| author | Huihui Guo Xiong Wang Tingting Liu Zhijiang Guo Yang Gao |
| author_facet | Huihui Guo Xiong Wang Tingting Liu Zhijiang Guo Yang Gao |
| author_sort | Huihui Guo |
| collection | DOAJ |
| description | Micro-electromechanical system (MEMS) skin friction sensors are considered to be promising sensors in hypersonic wind tunnel experiments owing to their miniature size, high sensitivity, and stability. Aiming at the problem of short test duration (a few milliseconds) and heavy load in a shock wind tunnel, the fast readout circuit and the sensor head structures of a MEMS skin friction sensor are presented and optimized in this work. The sensor was fabricated using various micro-mechanical processes and micro-assembly technology based on visual alignment. Meanwhile, the sensor head structure was integrated with the fast readout circuit and tested by using a centrifugal force equivalent method. The calibration results show that this sensor provides good linearity, sensitivity, and stability. The measurement ranges are 0–2000 Pa with good performance. The resolution is better than 10 Pa at 3000 Hz detection frequency of the readout circuit for the sensor in ranges from 0 to 1000 Pa. In addition, the repeatability and linearity of static calibration for sensors are better than 1%. |
| first_indexed | 2024-03-09T21:25:25Z |
| format | Article |
| id | doaj.art-268726713d23474dbd4a5c72f9936f26 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T21:25:25Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-268726713d23474dbd4a5c72f9936f262023-11-23T21:10:43ZengMDPI AGMicromachines2072-666X2022-01-0113223410.3390/mi13020234MEMS Skin Friction Sensor with High Response Frequency and Large Measurement RangeHuihui Guo0Xiong Wang1Tingting Liu2Zhijiang Guo3Yang Gao4School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaHypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaMicro-electromechanical system (MEMS) skin friction sensors are considered to be promising sensors in hypersonic wind tunnel experiments owing to their miniature size, high sensitivity, and stability. Aiming at the problem of short test duration (a few milliseconds) and heavy load in a shock wind tunnel, the fast readout circuit and the sensor head structures of a MEMS skin friction sensor are presented and optimized in this work. The sensor was fabricated using various micro-mechanical processes and micro-assembly technology based on visual alignment. Meanwhile, the sensor head structure was integrated with the fast readout circuit and tested by using a centrifugal force equivalent method. The calibration results show that this sensor provides good linearity, sensitivity, and stability. The measurement ranges are 0–2000 Pa with good performance. The resolution is better than 10 Pa at 3000 Hz detection frequency of the readout circuit for the sensor in ranges from 0 to 1000 Pa. In addition, the repeatability and linearity of static calibration for sensors are better than 1%.https://www.mdpi.com/2072-666X/13/2/234skin friction sensorsshock tunnel experimentMEMSfast readout circuit |
| spellingShingle | Huihui Guo Xiong Wang Tingting Liu Zhijiang Guo Yang Gao MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range Micromachines skin friction sensors shock tunnel experiment MEMS fast readout circuit |
| title | MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range |
| title_full | MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range |
| title_fullStr | MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range |
| title_full_unstemmed | MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range |
| title_short | MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range |
| title_sort | mems skin friction sensor with high response frequency and large measurement range |
| topic | skin friction sensors shock tunnel experiment MEMS fast readout circuit |
| url | https://www.mdpi.com/2072-666X/13/2/234 |
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