MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range

MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range

Micro-electromechanical system (MEMS) skin friction sensors are considered to be promising sensors in hypersonic wind tunnel experiments owing to their miniature size, high sensitivity, and stability. Aiming at the problem of short test duration (a few milliseconds) and heavy load in a shock wind tu...

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Bibliographic Details
Main Authors: Huihui Guo, Xiong Wang, Tingting Liu, Zhijiang Guo, Yang Gao
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
skin friction sensors
shock tunnel experiment
MEMS
fast readout circuit
Online Access:https://www.mdpi.com/2072-666X/13/2/234

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