Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

Although the small-scale effect and nonlinear damping on the nonlinear vibration of microbeam electrostatic resonators are important, they have been overlooked by researchers. We use the slender beam model including the small-scale effect and nonlinear damping to investigate the nonlinear vibrations...

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Bibliographic Details
Main Authors: Dayao Meng, Kun Huang, Wei Xu
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Micromachines
Subjects:
microbeam resonators
electric actuation
scale effect
nonlinear vibration
primary resonance
multiple-scale method
Online Access:https://www.mdpi.com/2072-666X/14/1/170

Internet

https://www.mdpi.com/2072-666X/14/1/170

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