Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

Although the small-scale effect and nonlinear damping on the nonlinear vibration of microbeam electrostatic resonators are important, they have been overlooked by researchers. We use the slender beam model including the small-scale effect and nonlinear damping to investigate the nonlinear vibrations...

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Main Authors: Dayao Meng, Kun Huang, Wei Xu
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/1/170
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author Dayao Meng
Kun Huang
Wei Xu
author_facet Dayao Meng
Kun Huang
Wei Xu
author_sort Dayao Meng
collection DOAJ
description Although the small-scale effect and nonlinear damping on the nonlinear vibration of microbeam electrostatic resonators are important, they have been overlooked by researchers. We use the slender beam model including the small-scale effect and nonlinear damping to investigate the nonlinear vibrations of the electrostatic resonators in the present paper. We apply the Galerkin method on a nonlinear partial differential equation to obtain the nonlinear ordinary differential equations for the first and third modes. The two equations include constant terms. The multiple-scale method is used to obtain the approximate analytical solutions of the two equations. The approximate analytical solutions discover the effects of driving electric field, small-scale effect, and nonlinear damping on structural vibrations. The results suggest that the small-scale effect, the direct current (DC) voltage, and the alternating current (AC) voltage have some critical effects on the vibrations of microresonators.
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spelling doaj.art-26945ec763e04d98bd87406cabadd3962023-11-30T23:34:10ZengMDPI AGMicromachines2072-666X2023-01-0114117010.3390/mi14010170Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic MicroresonatorsDayao Meng0Kun Huang1Wei Xu2Department of Engineering Mechanics, Faculty of Civil Engineering and Mechanics, Kunming University of Science and Technology, Kunming 650500, ChinaDepartment of Engineering Mechanics, Faculty of Civil Engineering and Mechanics, Kunming University of Science and Technology, Kunming 650500, ChinaDepartment of Engineering Mechanics, Faculty of Civil Engineering and Mechanics, Kunming University of Science and Technology, Kunming 650500, ChinaAlthough the small-scale effect and nonlinear damping on the nonlinear vibration of microbeam electrostatic resonators are important, they have been overlooked by researchers. We use the slender beam model including the small-scale effect and nonlinear damping to investigate the nonlinear vibrations of the electrostatic resonators in the present paper. We apply the Galerkin method on a nonlinear partial differential equation to obtain the nonlinear ordinary differential equations for the first and third modes. The two equations include constant terms. The multiple-scale method is used to obtain the approximate analytical solutions of the two equations. The approximate analytical solutions discover the effects of driving electric field, small-scale effect, and nonlinear damping on structural vibrations. The results suggest that the small-scale effect, the direct current (DC) voltage, and the alternating current (AC) voltage have some critical effects on the vibrations of microresonators.https://www.mdpi.com/2072-666X/14/1/170microbeam resonatorselectric actuationscale effectnonlinear vibrationprimary resonancemultiple-scale method
spellingShingle Dayao Meng
Kun Huang
Wei Xu
Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
Micromachines
microbeam resonators
electric actuation
scale effect
nonlinear vibration
primary resonance
multiple-scale method
title Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
title_full Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
title_fullStr Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
title_full_unstemmed Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
title_short Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators
title_sort impacts of small scale effect and nonlinear damping on the nonlinear vibrations of electrostatic microresonators
topic microbeam resonators
electric actuation
scale effect
nonlinear vibration
primary resonance
multiple-scale method
url https://www.mdpi.com/2072-666X/14/1/170
work_keys_str_mv AT dayaomeng impactsofsmallscaleeffectandnonlineardampingonthenonlinearvibrationsofelectrostaticmicroresonators
AT kunhuang impactsofsmallscaleeffectandnonlineardampingonthenonlinearvibrationsofelectrostaticmicroresonators
AT weixu impactsofsmallscaleeffectandnonlineardampingonthenonlinearvibrationsofelectrostaticmicroresonators