Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers
The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise leve...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/10/1870 |