Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy
An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-08-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/8/782 |