Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy

Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy

An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards...

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Bibliographic Details
Main Authors: Xufeng Liu, Takuya Takahashi, Masahiro Konishi, Kentaro Motohara, Hiroshi Toshiyoshi
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Micromachines
Subjects:
electrostatic
actuator
multi-object spectroscopy
random access addressing
Online Access:https://www.mdpi.com/2072-666X/11/8/782

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