Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators

Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators

Abstract Microelectromechanical systems (MEMS) resonators use is widespread, from electronic filters and oscillators to physical sensors such as accelerometers and gyroscopes. These devices' ubiquity, small size, and low power consumption make them ideal for use in systems such as CubeSats, mic...

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Bibliographic Details
Main Authors: David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Format: Article
Language:English
Published: Wiley-VCH 2023-11-01
Series:Advanced Materials Interfaces
Subjects:
heavy particle radiation
microelectromechanical resonators
piezoelectric resonators
radiation effects in electronics
radiation effects in microelectromechanical systems
Online Access:https://doi.org/10.1002/admi.202300240

Internet

https://doi.org/10.1002/admi.202300240

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