Radiation-Induced Nucleation and Growth of CaSi<sub>2</sub> Crystals, Both Directly during the Epitaxial CaF<sub>2</sub> Growth and after the CaF<sub>2</sub> Film Formation
The radiation-induced phenomena of CaSi<sub>2</sub> crystal growth were investigated, both directly during the epitaxial CaF<sub>2</sub> growth on Si (111) and film irradiation with fast electrons on Si (111) after its formation, while maintaining the specified film thickness...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-04-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/9/1407 |