A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance

A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance

This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electro...

Full description

Bibliographic Details
Main Authors: Lun Kong, Cheng Yu, Dunzhu Xia
Format: Article
Language:English
Published: MDPI AG 2013-02-01
Series:Sensors
Subjects:
micro dynamically tuned gyroscope (MDTG)
rotor wafer
adjustable capacitance
digitalized correction and decoupling
Online Access:http://www.mdpi.com/1424-8220/13/2/2176

Internet

http://www.mdpi.com/1424-8220/13/2/2176

Similar Items