A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance
This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electro...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2013-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/2/2176 |
| _version_ | 1798042306364833792 |
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| author | Lun Kong Cheng Yu Dunzhu Xia |
| author_facet | Lun Kong Cheng Yu Dunzhu Xia |
| author_sort | Lun Kong |
| collection | DOAJ |
| description | This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM) photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values. |
| first_indexed | 2024-04-11T22:33:42Z |
| format | Article |
| id | doaj.art-27c7c57894d34bbab3b6da32f8b1cff0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T22:33:42Z |
| publishDate | 2013-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-27c7c57894d34bbab3b6da32f8b1cff02022-12-22T03:59:17ZengMDPI AGSensors1424-82202013-02-011322176219510.3390/s130202176A Micro Dynamically Tuned Gyroscope with Adjustable Static CapacitanceLun KongCheng YuDunzhu XiaThis paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM) photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values.http://www.mdpi.com/1424-8220/13/2/2176micro dynamically tuned gyroscope (MDTG)rotor waferadjustable capacitancedigitalized correction and decoupling |
| spellingShingle | Lun Kong Cheng Yu Dunzhu Xia A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance Sensors micro dynamically tuned gyroscope (MDTG) rotor wafer adjustable capacitance digitalized correction and decoupling |
| title | A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance |
| title_full | A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance |
| title_fullStr | A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance |
| title_full_unstemmed | A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance |
| title_short | A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance |
| title_sort | micro dynamically tuned gyroscope with adjustable static capacitance |
| topic | micro dynamically tuned gyroscope (MDTG) rotor wafer adjustable capacitance digitalized correction and decoupling |
| url | http://www.mdpi.com/1424-8220/13/2/2176 |
| work_keys_str_mv | AT lunkong amicrodynamicallytunedgyroscopewithadjustablestaticcapacitance AT chengyu amicrodynamicallytunedgyroscopewithadjustablestaticcapacitance AT dunzhuxia amicrodynamicallytunedgyroscopewithadjustablestaticcapacitance AT lunkong microdynamicallytunedgyroscopewithadjustablestaticcapacitance AT chengyu microdynamicallytunedgyroscopewithadjustablestaticcapacitance AT dunzhuxia microdynamicallytunedgyroscopewithadjustablestaticcapacitance |