Adsorption properties of porous silicon
Porous silicon shows some interesting features for micromechanical applications. Some applications make use of its high surface-to-volume ratio. A capacitive gas or humidity sensor using the adsorption of gases on the porous surface can be easily fabricated. However an opportunity for more sensitiv...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Institute of Telecommunications
2001-03-01
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| Series: | Journal of Telecommunications and Information Technology |
| Subjects: | |
| Online Access: | https://jtit.pl/jtit/article/view/41 |