Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of...

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Bibliographic Details
Main Authors: Libin Huang, Qike Li, Yan Qin, Xukai Ding, Meimei Zhang, Liye Zhao
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
resonant accelerometer
electrostatic stiffness
structural design
differential evolution algorithm
Online Access:https://www.mdpi.com/2072-666X/13/1/38

Internet

https://www.mdpi.com/2072-666X/13/1/38

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