Continuous Phase Plate Structuring by Multi-Aperture Atmospheric Pressure Plasma Processing
A multi-aperture atmospheric pressure plasma processing (APPP) method was proposed to structure the continuous phase plate (CPP). The APPP system was presented and removal investigation showed the removal function of APPP was of a high repeatability and robustness to the small disturbance of gas flo...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/4/260 |