A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Ultrasonic nondestructive testing (NDT) usually utilizes conventional bulk piezoelectric transducers as transceivers. However, the complicated preparation and assembly process of bulk piezoelectric ceramics limits the development of NDT probes toward miniaturization and high frequency. In this paper...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/3/306 |