The effect of nitrogen doping and heat treatment on electrical resistivity of CVD SiC bulks
With the expansion of chip size, the challenge of achieving uniform etching becomes progressively more formidable. Implementing CVD SiC etching rings enhances etching uniformity effectively and offers notable attributes of high purity and prolonged operational lifespan. Controlling the resistivity o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2023-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/acfbdb |