The effect of nitrogen doping and heat treatment on electrical resistivity of CVD SiC bulks

The effect of nitrogen doping and heat treatment on electrical resistivity of CVD SiC bulks

With the expansion of chip size, the challenge of achieving uniform etching becomes progressively more formidable. Implementing CVD SiC etching rings enhances etching uniformity effectively and offers notable attributes of high purity and prolonged operational lifespan. Controlling the resistivity o...

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Bibliographic Details
Main Authors: Jiabao Liu, Zhaofeng Chen, Lixia Yang, Pan Chai, Qiang Wan
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:Materials Research Express
Subjects:
CVD SiC bulks
nitrogen doping
heat treatment
electrical resistivity
Online Access:https://doi.org/10.1088/2053-1591/acfbdb

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