Low-Temperature Diffusion of Au and Ag Nanolayers for Cu Bonding

With the recent rapid development of IT technology, the demand for multifunctional semiconductor devices capable of high performance has increased rapidly, and the miniaturization of such devices has also faced limitations. To overcome these limitations, various studies have investigated three-dimen...

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Bibliographic Details
Main Authors: Sangmin Lee, Sangwoo Park, Sarah Eunkyung Kim
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/14/1/147