On‐Chip Annealing Using Embedded Micro‐Heater for Highly Sensitive and Selective Gas Detection
Abstract The demand for gas sensing systems that enable fast and precise gas recognition is growing rapidly. However, substantial challenges arise from the complex fabrication process of sensor arrays, time‐consuming data transmission to an external processor, and high energy consumption in multi‐st...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2024-07-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202401821 |