Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed....
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/12/2121 |