A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection effect of the water-air interface, a double-sided diaphragm MEMS electronic stethoscope (DMES) encapsulated by a novel double-...

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Bibliographic Details
Main Authors: Sicun Duan, Weidong Wang, Sai Zhang, Xi Yang, Yu Zhang, Guojun Zhang
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
MEMS
packaging
electronic stethoscope
SNR
Online Access:https://ieeexplore.ieee.org/document/9350589/

Internet

https://ieeexplore.ieee.org/document/9350589/

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