Disturbance Rejection Control for Active Vibration Suppression of Overhead Hoist Transport Vehicles in Semiconductor Fabs

Disturbance Rejection Control for Active Vibration Suppression of Overhead Hoist Transport Vehicles in Semiconductor Fabs

In modern semiconductor fabrication plants, automated overhead hoist transport (OHT) vehicles transport wafers in front opening unified pods (FOUPs). Even in a cleanroom environment, small particles excited by the mechanical vibration of the FOUP can still damage the chips if such particles land on...

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Bibliographic Details
Main Authors: Jiajie Qiu, Hongjin Kim, Fangzhou Xia, Kamal Youcef-Toumi
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Machines
Subjects:
dynamic system modeling
disturbance observer
vibration control
overhead hoist transport vehicle
Online Access:https://www.mdpi.com/2075-1702/11/2/125

Internet

https://www.mdpi.com/2075-1702/11/2/125

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