Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The e...

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Bibliographic Details
Main Authors: Fei Lyu, Zhenyan Zhang, Eng-Huat Toh, Xinfu Liu, Yinjie Ding, Yifan Pan, Chengjie Li, Li Li, Jin Sha, Hongbing Pan
Format: Article
Language:English
Published: MDPI AG 2014-12-01
Series:Sensors
Subjects:
cross-like Hall plate
sensitivity
offset
P-type covering layer
Online Access:http://www.mdpi.com/1424-8220/15/1/672

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http://www.mdpi.com/1424-8220/15/1/672

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