Performance Comparison of Cross-Like Hall Plates with Different Covering Layers
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The e...
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-12-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/1/672 |
| _version_ | 1811306053967544320 |
|---|---|
| author | Fei Lyu Zhenyan Zhang Eng-Huat Toh Xinfu Liu Yinjie Ding Yifan Pan Chengjie Li Li Li Jin Sha Hongbing Pan |
| author_facet | Fei Lyu Zhenyan Zhang Eng-Huat Toh Xinfu Liu Yinjie Ding Yifan Pan Chengjie Li Li Li Jin Sha Hongbing Pan |
| author_sort | Fei Lyu |
| collection | DOAJ |
| description | This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account. |
| first_indexed | 2024-04-13T08:37:32Z |
| format | Article |
| id | doaj.art-29e85f5ddd4142ba9df93650c410c2d0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:37:32Z |
| publishDate | 2014-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-29e85f5ddd4142ba9df93650c410c2d02022-12-22T02:54:02ZengMDPI AGSensors1424-82202014-12-0115167268610.3390/s150100672s150100672Performance Comparison of Cross-Like Hall Plates with Different Covering LayersFei Lyu0Zhenyan Zhang1Eng-Huat Toh2Xinfu Liu3Yinjie Ding4Yifan Pan5Chengjie Li6Li Li7Jin Sha8Hongbing Pan9School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaGLOBALFOUNDRIES Singapore, Singapore 738406, SingaporeGLOBALFOUNDRIES Singapore, Singapore 738406, SingaporeGLOBALFOUNDRIES Singapore, Singapore 738406, SingaporeNanjing Foreign Language School, Nanjing 210008, ChinaSchool of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science & Engineering, Nanjing University, Nanjing 210093, ChinaThis paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.http://www.mdpi.com/1424-8220/15/1/672cross-like Hall platesensitivityoffsetP-type covering layer |
| spellingShingle | Fei Lyu Zhenyan Zhang Eng-Huat Toh Xinfu Liu Yinjie Ding Yifan Pan Chengjie Li Li Li Jin Sha Hongbing Pan Performance Comparison of Cross-Like Hall Plates with Different Covering Layers Sensors cross-like Hall plate sensitivity offset P-type covering layer |
| title | Performance Comparison of Cross-Like Hall Plates with Different Covering Layers |
| title_full | Performance Comparison of Cross-Like Hall Plates with Different Covering Layers |
| title_fullStr | Performance Comparison of Cross-Like Hall Plates with Different Covering Layers |
| title_full_unstemmed | Performance Comparison of Cross-Like Hall Plates with Different Covering Layers |
| title_short | Performance Comparison of Cross-Like Hall Plates with Different Covering Layers |
| title_sort | performance comparison of cross like hall plates with different covering layers |
| topic | cross-like Hall plate sensitivity offset P-type covering layer |
| url | http://www.mdpi.com/1424-8220/15/1/672 |
| work_keys_str_mv | AT feilyu performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT zhenyanzhang performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT enghuattoh performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT xinfuliu performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT yinjieding performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT yifanpan performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT chengjieli performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT lili performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT jinsha performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers AT hongbingpan performancecomparisonofcrosslikehallplateswithdifferentcoveringlayers |