3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing desi...

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Bibliographic Details
Main Authors: Ruth Yadira Vidana Morales, Susana Ortega Cisneros, Jose Rodrigo Camacho Perez, Federico Sandoval Ibarra, Ricardo Casas Carrillo
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/8/2715