Modelling, Fabrication and Testing of RF Micro-Electro-Mechanical-Systems Switch

Modelling, Fabrication and Testing of RF Micro-Electro-Mechanical-Systems Switch

This paper presents an approach to evaluate capacitance developed by perforated membrane of RF MEMS switch with high accuracy. An analytical model is developed for both upstate and downstate of switch by including parasitic and fringing field capacitance in parallel plate capacitance model. The prop...

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Bibliographic Details
Main Authors: Srinivasa Rao Karumuri, P. Ashok Kumar, Girija Sravani Kondavitee, Aime Lay-Ekuakille
Format: Article
Language:English
Published: IEEE 2023-01-01
Series:IEEE Open Journal of Nanotechnology
Subjects:
Analytical model
fringing field
ligament efficiency
4-mask surface micromachining process parasitic
perforations
Online Access:https://ieeexplore.ieee.org/document/9999329/

Internet

https://ieeexplore.ieee.org/document/9999329/

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