Lattice and Micro-Strains in Polycrystalline Silicon Films Deposited on Ceramic Substrates
X-ray diffraction analysis indicated that the all silicon films are polycrystalline. The preferred orientation of silicon films deposited on SiAlON is almost i [110] direction perpendicular to substrate, whereas the preferred orientation of the silicon films deposited on mullite and alumina is in [1...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
VSB-Technical University of Ostrava
2003-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
| Subjects: | |
| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/319 |