Hardness, Modulus, and Refractive Index of Plasma-Assisted Atomic-Layer-Deposited Hafnium Oxide Thin Films Doped with Aluminum Oxide
Coatings with tunable refractive index and high mechanical resilience are useful in optical systems. In this work, thin films of HfO<sub>2</sub> doped with Al<sub>2</sub>O<sub>3</sub> were deposited on silicon at 300 °C by using plasma-enhanced atomic layer deposi...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/13/10/1607 |