High-Stability Algorithm in White-Light Phase-Shifting Interferometry for Disturbance Suppression

A hybrid algorithm, combining a “Gauss-type” envelope algorithm with the Carré algorithm, is proposed for disturbance suppression. For white-light phase-shifting interferometry (WLPSI), this novel algorithm provides suitable performance in suppressing noise caused b...

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Bibliographic Details
Main Authors: Chunxi Zhang, Haowei Li, Ningfang Song, Huipeng Li
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8445579/