Process dispersion monitoring: Innovative AEWMA control chart in semiconductor manufacturing
This study introduces a novel adaptive exponentially weighted moving average (AEWMA) control chart for monitoring process dispersion, employing adaptation to determine the smoothing constant. It is designed to effectively track shifts within expected ranges in process dispersion by computing the smo...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2024-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0190533 |